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Species with data from:

Biehl, H.; Boyle, K.J.; Seccombe, D.P.; Smith, D.M.; Tuckett, R.P.; Yoxall, K.R.; Baumgartel, H.; Jochims, H.W., Vacuum-UV fluorescence spectroscopy of SiF[sub 4] in the range 10--30 eV, J. Chem. Phys., 1997, 107, 3, 720, https://doi.org/10.1063/1.474437 .

3 matching species were found.

For each matching species the following will be displayed:

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  1. Difluorosilylene (F2Si)
  2. Trifluorosilyl radical (F3Si)
  3. SiF4+ (F4Si+)