Species with data from:
Vanhaelemeersch, S.; Van Hoeymissen, J.; Vermeylen, D.; Peeters, J., SiF2 as a primary desorption product of Si etching by F atoms: Interpretation of laser-induced fluorescence spectra; rate constant of the gas phase SiF2+F reaction, J. Appl. Phys., 1991, 70, 7, 3892, https://doi.org/10.1063/1.349197 .
2 matching species were found.
For each matching species the following will be displayed:
- Chemical name
- Chemical formula
- Structure image (if available)
Click on the name to see more data.
- Difluorosilylene (F2Si)
- Trifluorosilyl radical (F3Si)