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| Author: | Volpi, F. |
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Monnier, D.; Nuta, I.; Chatillon, C.; Gros-Jean, M.; Volpi, F.; Blanquet, E., Gaseous Phase Study of the Zr-Organometallic ALD Precursor TEMAZ by Mass Spectrometry, J. Electrochem. Soc., 2009, 156, 1, H71, https://doi.org/10.1149/1.3009595 . [all data]