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Igumenov, Igor K.; Semyannikov, Pyotr P.; Trubin, Sergei V.; Morozova, Natalia B.; Gelfond, Nikolay V.; Mischenko, Alexander V.; Norman, John A., Approach to control deposition of ultra thin films from metal organic precursors: Ru deposition, Surface and Coatings Technology, 2007, 201, 22-23, 9003-9008, https://doi.org/10.1016/j.surfcoat.2007.04.129 . [all data]