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| Author: | Asoh, Y. |
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Arai, T.; Goto, M.; Asoh, Y.; Takayama, D.; Shimizu, T., Measurements of diffusion coefficient of carbon fluoride (CF2) radical in DC pulsed carbon tetrafluoride discharge plasma, Jpn. J. Appl. Phys., Part 2, 1993, 32, L1469-L1470. [all data]