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Species with data from:

Vanhaelemeersch, S.; Van Hoeymissen, J.; Vermeylen, D.; Peeters, J., SiF2 as a primary desorption product of Si etching by F atoms: Interpretation of laser-induced fluorescence spectra; rate constant of the gas phase SiF2+F reaction, J. Appl. Phys., 1991, 70, 7, 3892, https://doi.org/10.1063/1.349197 .

2 matching species were found.

For each matching species the following will be displayed:

Click on the name to see more data.

  1. Difluorosilylene (F2Si)
    F2Si
  2. Trifluorosilyl radical (F3Si)
    F3Si