National Institute of Standards and Technology

NIST Chemistry WebBook, SRD 69

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Zbezhneva, S.G.

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Makarov, A.V.; Zbezhneva, S.G., Use of high-temperature mass spectrometry for analysis of the vapour phase of some substances used in film deposition, Vysokochist. Veshchestva, 1993, 1, 124. [all data]