Only one matching reference was found.
Dagata, J.A.; Squire, D.W.; Dulcey, C.S.; Hsu, D.S.Y.; Lin, M.C., MPI/MS detection of SiF and SiF2 radicals produced from the reaction of F2 and NF3 with silicon, Chem. Phys. Lett., 1987, 134, 2, 151, https://doi.org/10.1016/0009-2614(87)87112-9 . [all data]